Cryopumps tau siv ntau thiab ntau dua vim tias lawv tuaj yeem hloov cov cua sov los ntawm ib puag ncig qis mus rau lwm qhov chaw kub, yog li ua tiav cov txiaj ntsig txias. Txawm li cas los xij, thaum siv cryopumps, peb kuj yuav tsum tau xyuam xim rau qee qhov teeb meem kom tsis txhob muaj kev puas tsuaj rau cov khoom siv lossis kev nyab xeeb.
1. Ua ntej txhim kho lub cryopump, nyeem phau ntawv qhia kev ua haujlwm ntawm lub twj tso kua mis kom meej, thiab nruab nws kom raug raws li qhov yuav tsum tau muaj hauv phau ntawv qhia kom paub meej tias cov khoom siv tuaj yeem ua haujlwm tau zoo.
2. Thaum siv, xyuas kom meej tias qhov zoo thiab qhov siab ntawm cov kua ua tau raws li qhov yuav tsum tau ua, kom tsis txhob muaj kuab paug, uas yuav cuam tshuam rau kev ua haujlwm ntawm cov khoom siv.
3. Thaum siv, xyuas qhov kev nyab xeeb ntawm lub twj tso kua mis ntau zaus kom ntseeg tau tias lub twj tso kua mis ua haujlwm li qub.
4. Tsis tu ncua xyuas lub twj tso kua mis interface, cov ntsaws ruaj ruaj thiab lwm yam khoom kom ntseeg tau tias lawv ua tau zoo thiab ruaj khov.
5. Tsis tu ncua xyuas cov khoom siv hluav taws xob ntawm lub twj tso kua mis kom muaj kev nyab xeeb ntawm cov khoom siv hluav taws xob thiab zam cov xwm txheej txaus ntshai xws li hluav taws xob luv luv.
Cryopumps tau siv ntau thiab ntau dua. Lawv tuaj yeem hloov cov cua sov los ntawm ib puag ncig uas tsis muaj qhov kub thiab txias mus rau lwm qhov chaw uas tsis muaj qhov kub thiab txias, kom ua tiav cov txiaj ntsig txias. Txawm li cas los xij, cryopumps kuj muaj qee qhov kev txwv kev siv, thiab peb yuav tsum tau xyuam xim rau cov ntsiab lus hauv qab no thaum siv lawv:
1. Qhov tsawg kawg nkaus ua haujlwm kub ntawm lub cryopump feem ntau tsis tuaj yeem qis dua -196 degree, txwv tsis pub nws yuav ua rau cov khoom puas tsuaj.
2. Cov kua dej zoo thiab cov concentration ntawm cryopump kuj muaj qee yam yuav tsum tau ua. Yog tias cov kua ua tsis tau raws li qhov yuav tsum tau ua, nws yuav cuam tshuam rau kev ua haujlwm ntawm cov khoom siv.
3. Lub valve kev nyab xeeb ntawm lub cryopump kuj muaj qee yam kev siv, thiab nws yuav tsum tau xyuas ntau zaus kom ntseeg tau tias lub twj tso kua mis ua haujlwm li qub.
4. Cov kev sib tshuam thiab cov ntsaws ruaj ruaj ntawm lub cryopump kuj muaj qee yam kev siv, thiab lawv yuav tsum tau kuaj xyuas tsis tu ncua kom ntseeg tau tias lawv cov kev ua tau zoo thiab ruaj khov.
5. Cov khoom siv hluav taws xob ntawm lub cryopump kuj muaj qee yam kev siv. Lawv yuav tsum tau kuaj xyuas tsis tu ncua kom ntseeg tau tias muaj kev nyab xeeb ntawm cov khoom siv hluav taws xob thiab zam qhov xwm txheej txaus ntshai xws li hluav taws xob luv luv.